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0190-10042 AMAT 半導(dǎo)體系統(tǒng) 運(yùn)城

0190-10042 AMAT 半導(dǎo)體系統(tǒng) 運(yùn)城

0190-10042 AMAT 半導(dǎo)體系統(tǒng) 運(yùn)城

美國(guó)應(yīng)用材料(AMAT)發(fā)布了可形成適用于22nm～14nm邏輯IC的低介電率(low-k)層間絕緣膜的兩款制造裝置。分別是成膜裝置“Producer Black Diamond 3”和紫外線(UV)固化裝置“Producer Nanocure 3”。

由發(fā)布可知，因微處理器耗電量的1/3為布線耗電量所占，因此市場(chǎng)上要求能夠在降低布線耗電量的同時(shí)，確保高機(jī)械強(qiáng)度的層間絕緣膜。對(duì)此，應(yīng)用材料開發(fā)出了第3代low-k膜，并投產(chǎn)了可制造這種low-k膜的裝置。第3代low-k膜是帶有納米級(jí)空孔的多孔質(zhì)(Porous)膜，相對(duì)介電常數(shù)(k)僅為2.2。并提高了空孔率的均勻性等，使機(jī)械強(qiáng)度比原來(lái)最大改善至2倍，可以耐受成膜后晶圓處理工序和封裝組裝工序的應(yīng)力。據(jù)介紹，為提高均勻性，應(yīng)用材料改進(jìn)了UV固化裝置的光學(xué)系統(tǒng)及反應(yīng)室(Chamber)的設(shè)計(jì)，固化均勻性與原來(lái)相比最大提高了50%。并且，通過(guò)組合使用高輸出功率的UV光源和低壓固化工藝，將固化處理的速度提高了40%。

AMAT 0010-A0213 OPTICAL HEAD CMP
XYCOM XYCOM XVME-675 RQANS1
LAM RESEARCH 853-00198-002 GATE & LINKAGE INNERDOOR ASSY
LAM 716-028722-161 QUARTZ RING (FOR ESC CHUCK) KIT LAM TCP9400 POLY


BOC EDWARDS A540-11-999 BOC EDWARDS EXIT OIL FILTER CR BASE MODULE;

40CR
XYCOM PROFACE FP2500-T12 RQAUS1
NEW Xycom VME XVME-977 Hard / Floppy Drive Module
XYCOM VMEbus CPU XVME-674 *NICE*
XYCOM VMEbus XVME-674 *NICE*
XYCOM I/O MODULE XVME-401 *NEW IN BOX*
XYCOM XVME-674 CPU *USED*
XYCOM PROFACE GPH70-SC41-24VP (REV H) RQAUS1
XYCOM PROFACE GPH70-SC41-24VP RQAUS1
Nikon Scanner S202A Nikon 4S018-384-AFDRVX2 PCB
ASML PAS 2500 5000 STEPPER FLYS EYE 4022.435.0558.2 116534-8207/077


DAINIPPON SCREEN DNS FILE NO.:SEBA-000061 SEL NO.: SK0803-2003010


ASML PAS 2500 5000 STEPPER Y SLATOR
KLA TENCOR 8100 6400 WIEN FILTER CONTROLLER CHASSIS
KLA TENCOR 6200 6400 8100 HCI CHASSIS CONTROLLER
ASML PAS 2500 5000 STEPPER OCU OPERATOR CONTROL UNIT
Nikon Scanner S202A Nikon 4S018-416-1 RCDRVX2 PCB
NIKON INTERFEROMETER 4S018-167 ALGLIUIF2 PCB
APPLIED MATERIALS AMAT GLASSMAN HIGH VOLTAGE DECEL PSC 0240-96561

0090-91434
TEL TOKYO ELECTRON GATE VAT VALVE VD012-013275-1 48132-CE24-AKG1


Nikon Scanner S202A Nikon 4S018-608-WL3I06 PCB
Nikon Scanner S202A Nikon 4S017-983-VME-I/F-M PCB
AMAT 0020-30708 Ring, Clamp, Vespel, REM FGR, AL 150MM, Flat
AMAT 0020-34438 CHASSIS, BULKHEAD, DPS
AMAT 0190-00462 Mass Storage, Module, SBC
AMAT 0200-40218 DOME, TAPERED STYLE, FIRE POLISHED
AMAT 0500-00190 HELIX IS CONTROLLER 19" PANEL
MKS INSTRUMENTS 117426-G1 FINAL ASSY, IDA SYSTEM
ROTATION POWER 2130-C2 ILLUMINATION CONTROLLER, DUV, 208VAC, 1000W, 60

HZ
LAM 716-331157-013 DISK, INTERFEROMTER, TOP GAS
AMAT 9090-01193 ASSY GAS PANEL CTRL (NO OVENS)
GASONICS A95-062-01 ARM II,ASSY,W/PCA,A94-062-01:MOTOROLA
EDWARDS D15471025 Magnet Assembly
SHIN-ETSU Alpha8-cap QUARTZ, CAP TEL Alpha8
ELECTRO SCIENTIFIC INDUSTRIES 110M-PS esi LIGHTWAVE 110M-PS Diode

Laser with SER
Daihen SGM-30B1 Generator, Power, Frequency: 2460M Hz, Rated Power:

3000W, 200V
PACIFIC SCIENTIFIC 121-236 SC755A040-08, CONTROLLER 90S SPIN HI TORQUE

SC 750 SE
MITSUBISHI A3ACPUP21 MELSEC PROGRAMMABLE CONTROLLER; A3ACPU-PU21


MACTRONIX HZN850P5 Wafer Transfer and Handling-Horizon
NICOLET ECO-8M FT-IR Spectrometer ECO-8M-Metrology
XYCOM PM-102085A 100-240VAC 50/60Hz 3-1.5A OPERATOR INTERFACE 3115T,

TESTED
1 USED XYCOM 8503 OPERATOR INTERFACE CRT 115/230V
Proface XYCOM 4115T Industrial Computer Color Touchscreen, Nice Used

Tested
Proface XYCOM 4115T Industrial Computer Color Touchscreen, Very Nice

Used Tested
Denoyer Geppert T14 Multi-Torso: Female Configuration
CTI-Cryogenics High Vacuum Pump Cryo-Torr 8F Cryopump
1 USED XYCOM AUTOMATION 4115 T INDUSTRIAL COMPUTER COLOR TOUCHSCREEN

*MAKE OFFER
XYCOM Display/Operator Interface Unit 38-K42IMA-01 _ P/N: 14HC4AAZ _

99437-001B
Bird 4410A RF Wattmeter Kit Bird (4410-097 Refurb) ALL NEW ELEMENTS

0.45-1000MHz
Agilent 2100 BioAnalyzer G2938A
Physik Instruments E-463-00 90-120V,AC-45VA,16AT,Amplifier
Physik Instruments E-463-00 HVPZT Amplifier, 90-120V,AC-45VA,16AT


TEL TF234477-001 Assy, Power, Supply, Heater/Chiller
SCP GLOBAL 7471314A ROBOT 8400 UPPER BODY W/COVER for FSI
AMAT 0200-09847 Ring, Clamp, Flat, AL 100MM, .95HT Finger
XYCOM XYCOM 9450 RQAUS1
AMAT 0040-85748 CHAMBER LINER RIGHT, YTTRIUM, STEP,PRODU
AMAT 0040-80332 BOSS,UPPER GRIPPER
XYCOM PROFACE 3112T RQAUS1
XYCOM PROFACE 1341-1300-512-4GB-2K RQAUS1
AMAT 0242-18955 KIT, 300MM PCII PROCESS KIT
TEK TKD-100/8200 Chiller
AMAT 0222-09042 28M (92FT) CABLES REM. TO MAIN09042-1
XYCOM XYCOM 5019-A10000000-1111 RQAUS1
AMAT 0010-91829 Source Isolation Vacuum Gate Valve, 08140-FA24-

AIB1/004 A-649610
XYCOM PROFACE GPH70-LG11-24V RQAUS1
AMAT 0040-34148 LINER, GDP, 43R HOLE, HART 200MM
Harvard 33 Twin Syringe Pump Standard Infuse/Withdraw
APPLIED MATERIALS BROOKS ROBOT CONTROLLER 168904
AMAT 50309050000 Electron Column Beam Gun SV300 SemVision Opal Applied

Materials
Omron ES-002623 UNIT, SENSOR TEMP T/C
XYCOM PROFACE QPK-3D200-L2P RQAUS1
AMAT 0040-80232 CONNECTOR STRAP ASSY - QX
XYCOM PROFACE GP470-EG31-24V RQAUS1
AMAT 21016404078 SERVO POWER SUPPLY
AMAT 0200-09151 Ring, Electrode 125MM EB
AMAT 4060-00023 MANF 16STATION W/DNET 32 I/O
AMAT 0020-26975 6" BUFFER BLADE THIN METAL
TEL MB3M87-041637-11 COLUMN, TRAP
AMAT 0020-61991 COVER HOUSING WAFER HEAD 300mm
XYCOM XVME-674 CPU BOARD VMEBUS XVME674 USED
DAINIPPON SCREEN DNS EEW EDGE EXPOSURE BOX EEUE-001X
ASML STEPPER RETICLE ASML PAS2500 4022.431.1153.3 OVERLAY
TEL TOKYO ELECTRON UW200-Z WET STATION IWAKI BELLOWS PUMP FF-20BT1

E101
AMAT 0020-45069 SEAL, METAL, E-TYPE, 7.669 ID
AMAT 0200-02962 SINGLE RING QUARTZ 200MM SNNF (.25 HT) R
CTI 8510 Compressor 80313 Cryo Pump Compressor