XYCOM 3410-301312001100P 系統(tǒng)卡件 運城
XYCOM 3410-301312001100P 系統(tǒng)卡件 運城
產(chǎn)品價格:¥1800(人民幣)
  • 規(guī)格:3410-301312001100P
  • 發(fā)貨地:廈門
  • 品牌:
  • 最小起訂量:1個
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    會員級別:鉆石會員
    認證類型:企業(yè)認證
    企業(yè)證件:通過認證

    商鋪名稱:廈門興銳嘉進出口有限公司

    聯(lián)系人:劉錦玉(小姐)

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    聯(lián)系地址:廈門市思明區(qū)呂嶺路1733號創(chuàng)想中心20樓

    郵編:361000

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      XYCOM 3410-301312001100P 系統(tǒng)卡件 運城

      XYCOM 3410-301312001100P 系統(tǒng)卡件 運城

      XYCOM 3410-301312001100P 系統(tǒng)卡件 運城


      美國應(yīng)用材料()發(fā)布了可形成適用于22nm~14nm邏輯IC的低介電率(low-k)層間絕緣膜的兩款制造裝置。分別是“Producer Black Diamond 3”和紫外線(UV)“Producer Nanocure 3”。

      由發(fā)布可知,因微處理器耗電量的1/3為布線耗電量所占,因此市場上要求能夠在降低布線耗電量的同時,確保高機械強度的層間絕緣膜。對此,應(yīng)用材料開發(fā)出了第3代low-k膜,并投產(chǎn)了可制造這種low-k膜的裝置。第3代low-k膜是帶有納米級空孔的多孔質(zhì)(Porous)膜,相對介電常數(shù)(k)僅為2.2。并提高了空孔率的均勻性等,使機械強度比原來最大改善至2倍,可以耐受成膜后晶圓處理工序和封裝組裝工序的應(yīng)力。據(jù)介紹,為提高均勻性,應(yīng)用材料改進了UV的光學(xué)系統(tǒng)及反應(yīng)室(Chamber)的設(shè)計,固化均勻性與原來相比最大提高了50%。并且,通過組合使用高輸出功率的UV光源和低壓固化工藝,將固化處理的速度提高了40%。


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