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0190-22090 AMAT 半導(dǎo)體系統(tǒng)

0190-22090 AMAT 半導(dǎo)體系統(tǒng)

0190-22090 AMAT 半導(dǎo)體系統(tǒng)

新的NMOS（N型金屬氧化物半導(dǎo)體）外延沉積工藝對(duì)下一代移動(dòng)處理器芯片內(nèi)更快的晶體管至關(guān)重要

應(yīng)用材料公司在Applied Centura RP Epi系統(tǒng)設(shè)備上新開(kāi)發(fā)了一套NMOS晶體管應(yīng)用技術(shù)，繼續(xù)保持其在外延技術(shù)方面十年來(lái)的領(lǐng)先地位。該應(yīng)用技術(shù)的開(kāi)發(fā)符合行業(yè)在20納米節(jié)點(diǎn)時(shí)將外延沉積從PMOS(P型金屬氧化物半導(dǎo)體)向NMOS(N型金屬氧化物半導(dǎo)體)晶體管延伸的趨勢(shì)，推動(dòng)芯片制造商打造出更快的終端，提供下一代移動(dòng)計(jì)算能力。

NMOS外延可將晶體管速度提高半個(gè)器件節(jié)點(diǎn)，同時(shí)不增加關(guān)閉狀態(tài)下的功耗

“外延是高性能晶體管的基本組成部分，速度提升相當(dāng)于縮放半個(gè)器件節(jié)點(diǎn)�！�應(yīng)用材料公司硅系統(tǒng)事業(yè)部晶體管與金屬化產(chǎn)品副總裁Steve Ghanayem表示，“除了傳統(tǒng)的PMOS 外延以外，通過(guò)實(shí)施NMOS外延工藝，我們能幫助晶圓代工客戶進(jìn)一步增強(qiáng)用于下一代器件的晶體管性能�！�

自90納米終端節(jié)點(diǎn)以來(lái)，具有即時(shí)摻雜性能的應(yīng)變選擇性外延膜已經(jīng)改善了PMOS晶體管的遷移率，降低了電阻，從而提高了晶體管的速度。在NMOS 晶體管中采用選擇性外延，具有類似的提升作用，能夠增強(qiáng)總體芯片的性能。通過(guò)將這種技術(shù)用于這兩類晶體管，應(yīng)用材料公司推動(dòng)了行業(yè)發(fā)展，以滿足日益增長(zhǎng)的多功能移動(dòng)產(chǎn)品更快和更高計(jì)算能力的需求。這種性能的提升有助于客戶實(shí)現(xiàn)更先進(jìn)的功能，如提升多任務(wù)和更高品質(zhì)的圖形以及影像處理能力等。

Centura RP Epi系統(tǒng)設(shè)備是經(jīng)過(guò)生產(chǎn)實(shí)踐證明的PMOS外延應(yīng)用領(lǐng)域的的領(lǐng)導(dǎo)者。隨著今天這項(xiàng)新技術(shù)的推出，該系統(tǒng)的應(yīng)用范圍如今已涵蓋了NMOS晶體管指定區(qū)域薄膜的選擇性沉積。應(yīng)用材料公司市場(chǎng)領(lǐng)先的專有外延技術(shù)能夠?qū)崿F(xiàn)高質(zhì)量應(yīng)變膜在沉積時(shí)進(jìn)行精準(zhǔn)的原子摻雜。嚴(yán)格的制造工藝控制帶來(lái)優(yōu)秀的膜性能、均勻性和極低缺陷率。這些特性解決了諸多性能問(wèn)題，包括關(guān)鍵電荷層的電阻率問(wèn)題。

對(duì)CenturaRPEpi系統(tǒng)設(shè)備的市場(chǎng)領(lǐng)導(dǎo)地位發(fā)揮核心作用的是其集成的低溫預(yù)清潔Siconi　技術(shù)。在同一個(gè)真空平臺(tái)集成預(yù)清潔和外延工藝，能夠消除排隊(duì)時(shí)間，相較單機(jī)獨(dú)立系統(tǒng)設(shè)備能夠減少界面污染超過(guò)一個(gè)數(shù)量級(jí)，從而打造純潔的硅表面，實(shí)現(xiàn)無(wú)缺陷外延晶體生長(zhǎng)。

應(yīng)用材料公司(納斯達(dá)克：AMAT)是一家全球領(lǐng)先的高科技企業(yè)。應(yīng)用材料公司的創(chuàng)新設(shè)備、服務(wù)和軟件被廣泛應(yīng)用于先進(jìn)半導(dǎo)體芯片、平板顯示器和太陽(yáng)能光伏產(chǎn)品制造產(chǎn)業(yè)。我們的技術(shù)使智能手機(jī)、平板電視和太陽(yáng)能面板等創(chuàng)新產(chǎn)品以更普及、更具價(jià)格優(yōu)勢(shì)的方式惠及全球商界和普通消費(fèi)者。

AMAT 0190-05276 CDO,LWR DOUBLE SECONDARY-TOWER,C-276,HAST
AMAT 0010-A0208 IPM ELecricity Box
XYCOM PROFACE GP477R-EG11 RQANS2
AMAT 0195-00185 HV ESC VACUUM HARNESS ASSEMBLY
AMAT 0040-40865 Heater Mounting Plate 300MM Anneal
ASML PAS 2500 5000 STEPPER ULTRA CLEAN AIR FOOT BELL 374
DNS 80 DNS80 DAINIPPON SCREEN MAIN CONTROLLER EEBH-0011X1 IGK3S
AMAT 0010-76340 ASSY 6" HTHU BUFFER BLADE
AMAT 0020-88831 Turbo Pump
AMAT 0040-35851 Pedestal, ESC 195mm, Flat, DPS Chamber
AMAT 0040-91670 PLATE, TILT AXIS STATIONARY
AMAT 0242-37454 KIT,BASIC GAS BOX,UNIVERSAL CHAMBER
Advanced Energy 27-344537-00 Apex 5513 RF Generator, 13.56MHz 208VAC
AMAT 9090-1265ITL DECEL PSU -6KV QUANTUM X
Advanced Energy 3150852-004 RF Generator, VHF 2060, 208VAC appears new
LAM RESEARCH 853-031685-001 LAM 9600 TCP MATCH
RIETSCHLE VLT 10 Process Vacuum
WJ WJ-TEOS958CRS TEOS Delivery System
MKS Vacuum Gauge Calibration and Verification System
VARIAN E11054660 ASSY, ES GAS DRY
AMAT 0040-90122 PLATE, Y AXIS STAIONARY BEA
MRL INDUSTRIES 4600819112 REV 2 CORE, BLACK MAX FURNACE HEATER ELEMENT EXT NG 34
AMAT 0195-01051 BOARD ASSY DSG
XYCOM PROFACE GP2600-TC41-24V RQAUS1
AMAT 1120-A0150 LENS-OBJECTIVE
AMAT 9090-01181ITL AMAT Implant Controller CHAS PLASMA FLOOD (AR) DC DAQ, 9090-0
XYCOM PROFACE GP577R-SC11 RQAUS1
XYCOM PROFACE GP577R-SC11 (REV J) RQAUS1
XYCOM PROFACE GP450-EG11 RQAUS1
NOVELLUS 27-251604-00 TURBO PUMP TMP 2000L LEYBOLD
NICHIYO ENGINEERING CORP. 07030 UNIT OZONE KILLER, MODEL KCM-480G , 07030
HERAEUS 44798 PLATE, DISPERSION, QTZ RECIRC, SULFURIC, 9400
AVIZA 602783-09 SVG-Thermco VTR ELEMENT, HEATER, AVIZA 602783-09
AMAT 9240-00172ITL END EFFECTOR & MAPPER 300
CANON KBB05622 6 INCH RETICLE STAGE
SINFONIA SSM-2075BGMS-C SUMITOMO CYCLO DRIVE CNVX-4105-LB-11 WITH SHINKO SS-SERV
AMAT 0190-01905 CONTROLLER, SETCH LL HEATER
AMAT 0020-48892 CLAMP RING, 6" SMF, AL, EE 2.00MM, 4TABS
VARIAN E11001000 LEFT ARM SERVO CONTROLLER
AMAT 0020-02126 BELLOWS SEAT, BOTTOM, REV. 5.2 HEAD, ECP
AMAT 0227-01117 WLDMNT, DUAL VALVE, FEM/FEM, MNL/MNL
AMAT 220550586 V18 ASSY LEO
AMAT 9090-01265 DECEL PSU -6KV QUANTUM X
LAM 853-012600-102 INDEXER,REC,W/ENCLOSURE
TEL MB3S80-000332-11 ROTARY, DRIVE FEEDTHRU; 447-21765-00; C24707 52-132058B
391-41000-02 NOVA COMPUTER CONTROL UNIT
AMAT 0190-35798 16 CHANNEL TEMPERATURE CONTROLLER
AMAT 0040-98210 Assembly, Bellows Vacuum Robot
XYCOM PROFACE 5019T RQAUS1
XYCOM XYCOM 9465-KPM RQAUS1
AMAT 0020-12396 TOP PLATE HEATER ECP ANNEAL 300MM
AMAT 0010-10973 ASSEMBLY, H.O.T. DETECTOR MODULE
EBARA A10S Multi-Stage Dry Pump with Controller
AMAT 0041-05535 Liner, Cathode, Direct-Cooled, Baffle Y2
AMAT 0090-A9920 IPU 2.4Ghz DR200 Base w/Software
AMAT 0100-00777 PCB, DUAL STEPPER INTERFACE
AMAT 99DE0044000 PICK LIST FOR NEW
AMAT 0020-13814 200MM BLADE W/WAFER POCKET MC-ROBOT P5000
AMAT 0040-80413 RING ASSY,CHAMBER SEALING - QX
Xycom Utomation 3612-T Panel Control Flat Touch Screen (NEW) (CC1)
Nikon Precision S202A Scanner Wafer Chuck Holder S203
DNS POWER SUPPLY MR-2015A 2-39-45432 DAINIPPON SCREEN ENGINEERING (3ea) MR2015
TOKYO ELECTRON TEL LITHIUS ACT12 PCB DENSAN CTE244-000076-12 E2B404 750CL
AMAT 0010-92537ITL ASSY DUMMY CASSETTE (300)
AMAT 0190-08033 MKS ENI DCG-200Z DC Power Supply, DC24M-Z041300110A
AMAT 21016404386 Amplifier, 50V, Y AXIS, Modified
Xycom 8430 Industrial Computer Controller
TOKYO ELECTRON LIMITED TEL WAVES CONTROLLER ALPHA 8SE TVB0010-1
TEL ES1D80-001291-13 POWER,SUPPLY, DC REPAIR
AMAT 0190-01553 TBV DRIVE ASSY, THROTTLE VALVE 15:1 GEAR
XYCOM PROFACE GP577R-TC41-24VP RQAUS1
AMAT 3870-02202 VALVE AIR-ACT HEATED INJCTN 1/4VCR-M/F SST
XYCOM XYCOM 3512-A1A114103500S RQAUS1
XYCOM XYCOM 9487-47C2319011-000 RQAUS1
XYCOM PROFACE GP477R-EG41-24VP (28506140044) RQAUS1
XYCOM PROFACE GP470-EG21-24VP RQAUS1
XYCOM PROFACE GP477R-EG41-24VP (34532100204) RQAUS1
XYCOM PROFACE GP570-SC21-24VP RQAUS1
XYCOM PROFACE GP570-LG21-24V RQAUS1
XYCOM PROFACE GP570-TC21-24VP RQAUS1
XYCOM PROFACE GP570-TC31-24V (REV C) RQAUS1
XYCOM PROFACE GP570-TC31-24V RQAUS1
XYCOM PROFACE GP477R-EG41-24VP RQAUS1
AMAT 9010-01457ITL Extraction Rotate/Slide Mech
AMAT 0200-35234 Susceptor, SGL, R3 Rot, EPI, 150MM, 9.7"OD X 15"THK
AMAT 0100-01329 PCB ASSEMBLY, INTERLOCK PERSONALITY BOAR
AzTECH TL-10RU GENERATOR, RF
Eurotherm Xycom HMI Model PM4850A Used
KLA TENCOR AIT2 WAFER APS2 AIT2
Applied Materials AMAT Onoda Ozone Generator OR-4ZA 0920-01016
VAT VALVE PENDULUM VALVE 65040-PACV-AYU2/0106 A-891916
AMAT 0010-23172 ASSEMBLY, TOP MATCH, 200MM ULTIMA X, HDP
AMAT 0010-75277 Cassette Assembly LLA (PA200-79MDT) CORROSIO
BROOKS 002-7200-21 Wafer Load Port Handlers, One Pair (L&R)
AMAT 0190-70079 COMDEL CPS-1001 60MHz 1kW RF POWER SUPPLY
DNS 2-VC-28690 CONTROLLER, HEATER
ASM 2587610-01 DOOR, PROCESS ASSY LP-BR-SS
AMAT 9010-01576 Maintenance Arm Assembly, SRC Turbo
AMAT 9240-01256ITL KIT OPTION SDS BF3 GAS
AGC ELECTRONIC AMERICA GP1104 SIC BAFFLE HOLDER- Silicon Nitride
EBARA 2009151CMP CMP Controller
Newport MM4006 Motion Controller, AC Autorange 100-240 Vac, 47/63Hz, Input: 600V
NOVA ELECTRONICS 0190-77284 NovaScan 840 Nova Controller Nova CU Unit Repaired
SDL 82-00048 Fiber Laser Industrial Laser Systems, power output: 9.0W cw, power
AMAT 0040-05528 ADAPTER ELECTRA, IMP OU
Advanced Energy PDX 2500 Power Supply, 3156012-101, 2.5KW, 400KHz
NEW XYCOM 3406 T OPERATOR INTERFACE MAN-MACHINE HMI 6INCH 3406-0000010000000 BT
AMAT 0010-09337 AMAT 0010-09337, 200 MM Lamp Module, IMF, ASSY, for CVD 5000
AMAT 5075-98008 LOADPORT,REV 5,300mm,26 WAFER SMIF
AMAT 9010-02083ITL X-CRIPP Panel
Avtron T477W Bonding Meter with C22161 & C15479 Inventory 534
Avtron T477W Bonding Meter with C22161 Inventory 530
Avtron T477W Bonding Meter with C15479 Inventory 538
XYCOM XYCOM 3515-01L214103501X RQAUS1
XYCOM 9460 OPERATOR INTERFACE PANEL 9460-01001020011004 (RUST) *USED*
AMAT 0190-06212 Heater, Exhaust, Zone 3, RTP XE, 200MM
AMAT 0190-09427 PLASMA,APPLICATOR,ASP,METCH MXP CENTURA
AMAT 9090-01274 VAC B/L CHAS (EDWARDS GAUGES)
XYCOM XYCOM 9462-0132120016002 RQANS1
LAM ASIQ DRYTEK QUAD ETCHER CASSETTE LOWER ELEVATOR WITH BELLOW
AMAT 9010-01460 LEYBOLD 800120V0002 ASSY, MAG TURBO Pump PURGE VALVE
AMAT 0240-30643 PIK, Wafer Lift, REV 1 Ceramic, 200 MM
XYCOM PROFACE GP2500-TC41-24V RQAUS1
AMAT 0040-08917 PROTECTOR, MEG HVM
AMAT 9090-00442ITL DECEL PSU RESISTOR ASSEMBLY
NEW Xycom Proface Interface Touchscreen, PFXGP4501TMD, NIB, Warranty
AMAT 0200-35183 SUSC. TOS R3 ROTATION 150MM, EPI
XYCOM XYCOM 3512-23T434003501K RQAUS1
AMAT 0150-01038 CABLE ASSY, SEB PCB TO BULKHEAD UPPER IN
XYCOM PROFACE GP2501-SC11 RQAUS1
XYCOM PROFACE GP530-TC11 RQAUS1
Xycom Operator Interface Panel 9475 Used #80770
APPLIED MATERIALS AMAT IMPLANTER 9500 XR80 0090-91698 XR30H POWER SUPPLY
Varian Implanter CPU PCB 044-000311-1
DNS 2-AE-J0132 ASSY, HP RIGHT SK2000
Miltenyi SuperMACS II Separator
XYCOM PROFACE GP430-EG11 RQANS1
LTX CREDENCE PROBER DUAL HFI 7V 300 AMP POWER SUPPLY 858-1158-01 876-0079-01 ATE
AMAT 0222-41508 Retrofit 2nd Wafer Orienter
AMAT 0100-89004 PCB Assembly, Lamp Fail Detector
XYCOM 3512-23J0004003100K OPERATOR INTERFACE SCREEN *USED*
XYCOM PROFACE 3715KPMT-1000-512-CDF-2K RQANS2
XYCOM XYCOM 9450-27B1317010000 RQAUS1
AMAT 0010-10521 ASSY, SABPSG 8" T1SABB THICK SUSCEPTOR
XYCOM XYCOM 3512-03F114003101F RQAUS1
Pro-face XYcom 4715KPM _ 4715-0011210110010_1300-512-CDW-F-2K_100-240 VAC, 1 Amp
AMAT 3870-02563 No-Friction Gate Valve with Pneumatic Actuator, 1.01D 10E-7MBAR
XYCOM XYCOM 3515-02M414103601Y RQAUS1
XYCOM XYCOM 90727-001 RQAUS1
AMAT 0010-A3840 Assembly- Temperature Controller PCA Module
AMAT 0010-76413 8" Quartz Blade Assembly
AMAT 0100-09254 PCV ASSEMBLY ENDPOINT SELECT INTERCONNEC
Xycom 1507-0142110001000 Operator Interface - Used
AMAT 50409140100 Bent Light Guide-YAP, SEM Vision YAP with Optical Grease 0.5mL
AMAT 50490536000 CK T/N #536 FANS FOR
XYCOM 3535-E3T434003901E USED MODEL 3535 KPM OPERATOR PANEL 3535E3T434003901E
UNITY TEL TOKYO ELECTRON DRM2 ESC ELECTROSTATIC CHUCK 200MM 1D10.101567.12
NIKON PRECISION NSR1000 MOLECTRON IRRADIANCE METER
APPLIED MATERIALS AMAT PRODUCER SE FI FRONT LOADER
AMAT 0010-A8230 PBS ASSY, COMPLUS 2
AMAT 0021-00271 MOUNTING RING FOR POLY R2 DTCU
AMAT 0200-00715 BASEPLATE W/BAFFLE QTZ SERIALIZED
AMAT 0226-41807 WELDMENT,2 VALVE MANIFOLD,APTECH,10RA
AMAT 1140-00538 PSU G3 TO SPEC 0190-24145, Series KL, Input: 208V, 48-63Hz, 1 Ph
Teradyne 802231 Z-Stage Unit
AMAT 200P-CASSETTE-ALIGNMENT-TOOL CASSETTE ALIGNMENT TOOL AMAT appear new unused
BRADY MGL Label and Sign Maker 3, Rated: 100-240V~, 50/60Hz
Advanced Energy PDX 2500 Power Supply, 3156012-101, 2.5KW, 400KHz, B15181855AE
Stoelting 51400 AnyAngle Stereotaxic Instrument
NBS Biocommand Interface New Brunswick Scientific
Harvard 55-7059 Inspira Advanced Safety Ventilator
XYCOM 9457-0238120011001 945702381200110 9457-713332 Micro Vitec New
XYCOM PROFACE GP577R-TC11 RQAUS1
XYCOM PROFACE GP577R-TC11 (REV P) RQAUS1
EBARA A30W Multi-Stage Dry Pump Controller
XYCOM PROFACE GP477R-EG11 (N/A) RQAUS1
AMAT 0200-01001 HOOP V2,CENTERING, 200MM IBC,SF3 ECP
AMAT 3870-02345 VALVE THROTTLE BTFL FACE SEAL W/KF 40 FLANGE
TEL B2ME-06-7211 BIPOLAR ESC; CDE-80N
SHIBURA SHA1852G-1 SHIBAURA SHA1852G-1 ESC power supply
TREBOR SS95-X SURGE, SUPPRESSOR SS95, ALO1636
TEL (FSI) 924228-002 ASSY,MOTOR/GEARBOX,RIGHT ANGLE ( TF924228-002 ) AC Servo Mo
MEGATEST Q2/62 Test System Wafer Test System
AMAT 1950094 "CABLE,X AXIS,TOP"
XYCOM XYCOM 9462-010314001104 RQANS2
AMAT 0100-76119 PCB Assembly, Power Supply
AMAT 0100-20238 PCB Assembly, Disk Power Distribution
AMAT 0200-40209 Slab, Si 18X Holes, BAFFLE, .080 THK CGF
XYCOM XYCOM 3515-01A21B103100T RQAUS1
Xycom Monitor-Miniflex Portrait 9486_9486-0343314010000_90-250 VAC_2.1A_47-63 Hz
AMAT 0200-10664 Dome, Dos, Non-Flame Polished
MRL INDUSTRIES 4600819112 REV 2-R CORE, BLACK MAX FURNACE HEATER ELEMENT EXT NG
PERKIN-ELMER 690-0837-006A PCB A901 MANIFOLD PRESSURE TRANSDUCER
XYCOM MODEL 8320 P/N 94321-002 USED OPERATOR INTERFACE DISPLAY 8320
ASML PAS2500 2500 STEPPER WAFER P-TABLE ASML5000
ASML PAS 2500 5000 STEPPER FLYS EYE 4022.435.0558.2
Kokusai Electric Furnace Loadlock D4CX09727 3ROT032690 DJ803
AMAT SET-805-753KR-Q AMAT ENDURA Process KIT, 8" PIK2 CERAMICOAT Includes 0040-2
XYCOM XYCOM XVME-630 RQAUS1
XYCOM XYCOM 9460-0103040011006 RQANS2
AMAT 0190-08599 PURCHASE SPECIFICATION, MULTIMETRIX SHUT
DNS 2-AE-J0261 ASSY, SRHP LEFT SK2000
Xycom 4850 PN: 91409-001 Operator Terminal
XYCOM XYCOM 4150B RQAUS1
AMAT 0045-00182 MAIN FRAME, 30KV EXTRACTION
AMAT 0650-00024 CMPTR, FLT PNL, PIII-800 MHZ, 256 MB MEM
AMAT 1350-50005 (AMJ) BARATRON 128A, 1/2VCR, Range: 100 TORR, Input: +/- 15 VDC,
AMAT 9090-00442 Decel PSU Resistor Assembly
XYCOM XYCOM 9465 RQAUS1
NEW XYCOM 3408-KP OPERATOR INTERFACE PM101757 , 3408KP
XYCOM XVME-675 CPU MODULE 70675-019 *NEW IN BOX*
Harris Inserter NP200 Xycom 2000T Screen
AMAT 0010-03060 300MM SST PR CH SLIT VALVE DR REV 3 ASSE
AMAT 0040-41834 MOTOR COVER, 15:1 MOTOR, LID HOIST, 300M
AMAT 1140-00214 PSU DECEL, 6KV, SPEC 0190-08212; GLASSMAN HIGH VOLTAGE INC MODEL
AMAT 9090-00209ITL Gas Panel Control Assembly (No Ovens)
AMAT 0190-08245 WET ROBOT, EDGE GRIP CAPABLE, NON COPPER
AMAT 99TN0553000 "CK T/N#553 15"" MAGNETIC"
AMAT 0150-04505 CABLE ASSY SYSTEM INTLK GAS PNL INTLK, P
AMAT 0100-20214 PCB Assembly FA/RGA Interface
AMAT 0050-04994 WELD MNFLD, LOCC, 1.6" STD, RTP
XYCOM XYCOM 3300ACT RQAUS1
AMAT 0050-05380 MANIFOLD, 4 STATION VALVE, N/O, LEFT, RT
AMAT 0226-31554 Voltage Sensor PCB
AMAT 50480555000 CK TN #555 MAGNETIC
AMAT 0040-79916 LINER, CATHODE, DIRECT-COOLED, BAFFLE, 3
XYCOM PROFACE 3615T-1000-256-CDF-2K RQAUS1
MRL 4620798979 GATE OXIDE FURNACE ELEMENT 33010500
AMAT 0190-02977 ASTEX ABX-X355; CONTROLLER,2.0/13.56MHZ ETO RF, M VERSION
AMAT 9010-01384ITL PNEUMATIC PANEL, GRIPPER
Cymer 05-10000-08 KAISER SYSTEMS INC (KSI) 1101071-2 MODEL LS6000; 1kV